Molecular depth profiling by ion beam erosion still deals with some bottlenecks such as the depth dependence of the SI yield, sputter induced topography, anisotropic erosion, limited depth range and extremely low sputter rate for some materials. To avoid these problems, a complementary method is developed.

The combination of ultra low angle microtomy (ULAM) with TOF-S-SIMS surface analysis of the section allows to characterise the molecular 3D distribution over a larger depth range or to investigate buried interfaces.